JPH0487754U - - Google Patents

Info

Publication number
JPH0487754U
JPH0487754U JP12641890U JP12641890U JPH0487754U JP H0487754 U JPH0487754 U JP H0487754U JP 12641890 U JP12641890 U JP 12641890U JP 12641890 U JP12641890 U JP 12641890U JP H0487754 U JPH0487754 U JP H0487754U
Authority
JP
Japan
Prior art keywords
liquid tank
cleaning liquid
substrate
cleaning
pressure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12641890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH081013Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12641890U priority Critical patent/JPH081013Y2/ja
Publication of JPH0487754U publication Critical patent/JPH0487754U/ja
Application granted granted Critical
Publication of JPH081013Y2 publication Critical patent/JPH081013Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Nozzles (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP12641890U 1990-11-30 1990-11-30 基板洗浄装置 Expired - Lifetime JPH081013Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12641890U JPH081013Y2 (ja) 1990-11-30 1990-11-30 基板洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12641890U JPH081013Y2 (ja) 1990-11-30 1990-11-30 基板洗浄装置

Publications (2)

Publication Number Publication Date
JPH0487754U true JPH0487754U (en]) 1992-07-30
JPH081013Y2 JPH081013Y2 (ja) 1996-01-17

Family

ID=31873977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12641890U Expired - Lifetime JPH081013Y2 (ja) 1990-11-30 1990-11-30 基板洗浄装置

Country Status (1)

Country Link
JP (1) JPH081013Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012114228A (ja) * 2010-11-24 2012-06-14 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 ウェーハの洗浄方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012114228A (ja) * 2010-11-24 2012-06-14 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 ウェーハの洗浄方法

Also Published As

Publication number Publication date
JPH081013Y2 (ja) 1996-01-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term